High Accuracy: Achieves 1.5% Full Scale (F.S) accuracy for precise flow measurements.
Linear Output without Temperature Compensation: Simplifies the system by providing linear output, but does not include temperature compensation.
Long-Term Stability: Minimal zero-drift ensures sustained accuracy over extended periods.
Robust Solid-State Sensing Core: No fragile surface cavity or film, making it resistant to blockages and pressure impacts.
Versatile Output Options: Offers both analog (1-5 V) and digital (I2C) outputs.
Quick Response Time: Extremely fast response time of 1 ms for dynamic flow changes.
Wide Flow Range: Capable of measuring flow from 0 sccm to 2000 sccm.
Adaptable to Humid Environments: Suitable for measuring gases in relatively humid conditions.

Test Conditions: VIN = 12±0.01VDC, Ta = 25°C, Relative humidity: 40% < RH < 60%
Maximum Operating Temperature Range: -25°C to +85°C

Specification	Minimum	Typical	Maximum	Unit	Remarks
Flow Range	0	—	3000	sccm	Customizable
Service Voltage	8	12	24	V
Current	—	20	15	mA
Maximum Voltage Output	4.94	5	5.02	V
Zero Point Voltage Output	0.98	1	1.02	V
Accuracy	—	1.5	2	%FS
Withstand Voltage	—	0.3	—	MPa	Customizable
Resolution Ratio	—	0.1	—	%	Full scale
Response Time	—	20	30	ms
Zero Drift	—	0.2	—	%Year	Full scale
Temperature Drift	—	—	4	%	0°C to 50°C
Overall Material	Silicon carbide, epoxy resin, PS, FR 4, silicon as sealing material

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