The CAFS 6000 Series gas mass flow sensor is designed using microelectromechanical system (MEMS) technology, making it highly suitable for measuring clean, relatively dry gases. This sensor enhances digitalization, intelligence, and safety in traditional industries, driving innovation. It supports a wide flow range to meet various industrial measurement needs, characterized by high sensitivity, reliability, stability, and cost-effectiveness, promoting energy efficiency and smart solutions.

Key Features and Benefits

High Precision and Advanced Processing:Accuracy: Ensures 1.5% Full Scale (F.S) accuracy, crucial for precise gas measurements.Integrated Processing: Features a high-resolution Δ-Σ A/D converter and internal calibration logic circuit. The built-in MCU processor provides real-time data acquisition and accurate flow signals without needing external calibration, thanks to advanced compensation algorithms.
Versatile Application Range:Broad Use Cases: Applicable in various fields including oxygen generators, gas masks and respirators, anesthesia delivery systems, CPAP equipment, instrumentation, leak detection, chromatographs, mass flow controllers, and environmental monitoring.
Robust and Reliable:Stability: Maintains long-term stability with minimal zero-drift, ensuring consistent performance.Solid-State Core: Durable sensing core without surface cavities or fragile films, offering resistance to blockage and pressure impacts.
Output Flexibility:Analog and Digital Outputs: Provides a 1-5V analog output and optional I2C output, catering to different integration needs.Fast Response Time: 65 ms response time ensures suitability for applications requiring quick feedback.
Wide Flow Range and Humidity Adaptability:Flow Range: Capable of measuring flows from 0 to 12,000 sccm, adaptable to diverse requirements.Humidity Handling: Suitable for relatively humid gas measurements, expanding its application potential.

Maximum Ratings

Operating Temperature: -15°C to 70°C
Storage Temperature: -25°C to 85°C
Humidity: 0 to 100% RH
Impact Resistance: Withstands impacts up to 100 g
Condensate Resistance: Designed to resist condensate water

Electrical Characteristics (Test Conditions: Vin = 12 ± 0.1VDC, Ta = 25°C, Relative Humidity: 40% < RH < 60%)

Specification	Min	Typical	Max	Unit	Remarks
Flow Range	0	—	10,000	sccm	Customizable
Service Voltage	8	—	24	V	Customizable
Current	—	50	—	mA
Max Voltage Output	4.96	5	5.02	V	Linear
Zero Point Voltage Output	0.98	1	1.02	V	Linear
Accuracy	—	1.5	2	%FS
Repetitiveness	±0.3	—	—	%
Resolution Ratio	—	0.1	—	%	Full Scale
Withstand Voltage	0.3	—	0.5	MPa	Customizable
Response Time	9	65	500	ms	Customizable
Zero Drift	—	0.2	—	%/Year	Full Scale
Calibration Conditions	—	0°C, 1 standard atmosphere	—
Materials	Silicon carbide, epoxy resin, PPS, silicon (sealing material)

The CAFS 6000 Series is engineered to support a broad spectrum of applications, ensuring high performance, durability, and precision in gas flow measurement and process control. This sensor is a crucial component for advancing energy-efficient and intelligent industrial solutions.